X’Pert³ MRD and MRD (XL) XRD

The new generation of versatile materials research diffraction systems

X’Pert³ MRD and MRD (XL) XRD

The long and successful history of PANalytical's Materials Research Diffractometers (MRD) continues with a new generation – X’Pert³ MRD and X’Pert³ MRD XL.

Supplier: Panalytical


  • Minimum step size 0.0001˚
  • Radius: X’Pert³ MRD 320 mm (horizontal)
  • Radius: X’Pert³ MRD XL 420 mm (horizontal)
  • x,y translation: 200 x 200 mm (X’Pert³ MRD XL)

The improved performance and reliability of the new platform have added more analytical capability and power for X-ray scattering studies in:

• advanced materials science
• scientific and industrial thin film technology
• metrological characterization in semiconductor process development

Both systems handle the same wide range of applications with full wafer mapping up to 100 mm (X’Pert³ MRD) or 200 mm (X’Pert³ MRD XL).

Product applications

  • Solid-state X-ray detection technology
  • Reciprocal space mapping
  • Orientation of single crystal cadmium tungstate
  • Studying the thermal stability of gallium nitride based high electron mobility transistor structures